Visualizing Ferroelectric Uniformity of Hf1-xZrxO2 Films Using X-ray Mapping.
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| Title: | Visualizing Ferroelectric Uniformity of Hf |
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| Authors: | Chang SJ; International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Teng CY; Department of Materials Science & Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Lin YJ; Department of Materials Science & Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Wu TM; Department of Electro-physics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Lee MH; Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei 10610, Taiwan., Lin BH; National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan., Tang MT; National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan., Wu TS; National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan., Hu C; International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.; Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States., Tang EY; Taiwan Semiconductor Research Institute, Hsinchu 30010, Taiwan., Tseng YC; Department of Materials Science & Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan. |
| Source: | ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2021 Jun 23; Vol. 13 (24), pp. 29212-29221. Date of Electronic Publication: 2021 Jun 13. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: American Chemical Society Country of Publication: United States NLM ID: 101504991 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1944-8252 (Electronic) Linking ISSN: 19448244 NLM ISO Abbreviation: ACS Appl Mater Interfaces Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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