Bibliographic Details
| Title: |
Visible upconversion luminescence of doped bulk silicon for a multimodal wafer metrology. |
| Authors: |
Afinogenov BI, Sofronov AN, Antropov IM, Filatov NR, Medvedev AS, Shorokhov AS, Mantsevich VN, Maslova NS, Kim T, Jeang E, Kim I, Seo M, Han K, Bae S, Joo W, Yoo H, Bessonov VO, Fedyanin AA, Ryabko MV, Polonsky SV |
| Source: |
Optics letters [Opt Lett] 2021 Jul 01; Vol. 46 (13), pp. 3071-3074. |
| Publication Type: |
Journal Article |
| Journal Info: |
Publisher: Optica Publishing Group Country of Publication: United States NLM ID: 7708433 Publication Model: Print Cited Medium: Internet ISSN: 1539-4794 (Electronic) Linking ISSN: 01469592 NLM ISO Abbreviation: Opt Lett Subsets: MEDLINE; PubMed not MEDLINE |
| Database: |
MEDLINE Ultimate |
