On the Reliability of HZO-Based Ferroelectric Capacitors: The Cases of Ru and TiN Electrodes.
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| Title: | On the Reliability of HZO-Based Ferroelectric Capacitors: The Cases of Ru and TiN Electrodes. |
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| Authors: | Khakimov RR; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia., Chernikova AG; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia., Koroleva AA; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia., Markeev AM; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia. |
| Source: | Nanomaterials (Basel, Switzerland) [Nanomaterials (Basel)] 2022 Sep 03; Vol. 12 (17). Date of Electronic Publication: 2022 Sep 03. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI AG Country of Publication: Switzerland NLM ID: 101610216 Publication Model: Electronic Cited Medium: Print ISSN: 2079-4991 (Print) Linking ISSN: 20794991 NLM ISO Abbreviation: Nanomaterials (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| ISSN: | 2079-4991 |
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| DOI: | 10.3390/nano12173059 |
