Reliability Characteristics of Metal-Insulator-Semiconductor Capacitors with Low-Dielectric-Constant Materials.
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| Title: | Reliability Characteristics of Metal-Insulator-Semiconductor Capacitors with Low-Dielectric-Constant Materials. |
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| Authors: | Cheng YL; Department of Electrical Engineering, National Chi-Nan University, Nan-Tou 54561, Taiwan., Peng WF; Department of Electrical Engineering, National Chi-Nan University, Nan-Tou 54561, Taiwan., Huang CJ; Department of Electrical Engineering, National Chi-Nan University, Nan-Tou 54561, Taiwan., Chen GS; Department of Materials Science and Engineering, Feng Chia University, Taichung 40724, Taiwan., Fang JS; Department of Materials Science and Engineering, National Formosa University, Huwei 63201, Taiwan. |
| Source: | Molecules (Basel, Switzerland) [Molecules] 2023 Jan 23; Vol. 28 (3). Date of Electronic Publication: 2023 Jan 23. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 100964009 Publication Model: Electronic Cited Medium: Internet ISSN: 1420-3049 (Electronic) Linking ISSN: 14203049 NLM ISO Abbreviation: Molecules Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| ISSN: | 1420-3049 |
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| DOI: | 10.3390/molecules28031134 |
