ToF-SIMS analysis of ultrathin films and their fragmentation patterns.

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Bibliographic Details
Title: ToF-SIMS analysis of ultrathin films and their fragmentation patterns.
Authors: Muramoto S; National Institute of Standards and Technology, Gaithersburg, Maryland 20899., Graham DJ, Castner DG
Source: Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society [J Vac Sci Technol A] 2024 Mar; Vol. 42 (2), pp. 023416. Date of Electronic Publication: 2024 Feb 05.
Publication Type: Journal Article
Journal Info: Publisher: Published for the Society by the American Institute of Physics Country of Publication: United States NLM ID: 9890566 Publication Model: Print-Electronic Cited Medium: Print ISSN: 0734-2101 (Print) Linking ISSN: 07342101 NLM ISO Abbreviation: J Vac Sci Technol A Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:0734-2101
DOI:10.1116/6.0003249