Fast, Efficient Tailoring Growth of Nanocrystalline Diamond Films by Fine-Tuning of Gas-Phase Composition Using Microwave Plasma Chemical Vapor Deposition.

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Title: Fast, Efficient Tailoring Growth of Nanocrystalline Diamond Films by Fine-Tuning of Gas-Phase Composition Using Microwave Plasma Chemical Vapor Deposition.
Authors: Tang C; School of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215500, China.; Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal., Fernandes AJS; Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal., Facao M; Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal., Carvalho AF; Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal., Chen W; School of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215500, China., Hou H; School of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215500, China., Costa FM; Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal.
Source: Materials (Basel, Switzerland) [Materials (Basel)] 2024 Jun 18; Vol. 17 (12). Date of Electronic Publication: 2024 Jun 18.
Publication Type: Journal Article
Journal Info: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101555929 Publication Model: Electronic Cited Medium: Print ISSN: 1996-1944 (Print) Linking ISSN: 19961944 NLM ISO Abbreviation: Materials (Basel) Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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ISSN:1996-1944
DOI:10.3390/ma17122976