Silicon double-disk optomechanical resonators from wafer-scale double-layered silicon-on-insulator.

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Bibliographic Details
Title: Silicon double-disk optomechanical resonators from wafer-scale double-layered silicon-on-insulator.
Authors: Navarathna A, Carey BJ, Bennett JS, Khademi S, Bowen WP
Source: Optics express [Opt Express] 2024 Nov 04; Vol. 32 (23), pp. 41376-41389.
Publication Type: Journal Article
Journal Info: Publisher: Optica Publishing Group Country of Publication: United States NLM ID: 101137103 Publication Model: Print Cited Medium: Internet ISSN: 1094-4087 (Electronic) Linking ISSN: 10944087 NLM ISO Abbreviation: Opt Express Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:1094-4087
DOI:10.1364/OE.538819