Performance Improvement of TiO2 Ultraviolet Photodetectors by Using Atomic Layer Deposited Al2O3 Passivation Layer.
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| Title: | Performance Improvement of TiO |
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| Authors: | Yang YT; Design and Materials for Medical Equipment and Devices, Da-Yeh University, Changhua 515006, Taiwan., Lin SC; Mechanical and Mechatronics System Research Labs, Industrial Technology Research Institute, Hsinchu 310401, Taiwan., Wang CC; Mechanical and Mechatronics System Research Labs, Industrial Technology Research Institute, Hsinchu 310401, Taiwan., Ho YR; Department of Electrical Engineering, Da-Yeh University, Changhua 515006, Taiwan., Chen JZ; Graduate Institute of Photonics, National Changhua University of Education, Changhua 50007, Taiwan., Huang JJ; Department of Electrical Engineering, Da-Yeh University, Changhua 515006, Taiwan. |
| Source: | Micromachines [Micromachines (Basel)] 2024 Nov 20; Vol. 15 (11). Date of Electronic Publication: 2024 Nov 20. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 2072-666X |
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| DOI: | 10.3390/mi15111402 |
