Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications.

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Bibliographic Details
Title: Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications.
Authors: Peng YC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Wang YJ; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Chen KH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Lin YH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Sakurai H; Institute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan., Chang HC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.; Electronic and Optoelectronic System Research Laboratories, Industrial Technology Research Institute, Hsinchu, 30010, Taiwan., Chiang CC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Duh RT; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Lee BR; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Huang CY; Department of Photonics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Shih MH; Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan., Horng RH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Konishi K; Institute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan., Tseng ML; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Source: Nano letters [Nano Lett] 2025 Feb 26; Vol. 25 (8), pp. 3141-3149. Date of Electronic Publication: 2025 Jan 29.
Publication Type: Journal Article
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 101088070 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1530-6992 (Electronic) Linking ISSN: 15306984 NLM ISO Abbreviation: Nano Lett Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:1530-6992
DOI:10.1021/acs.nanolett.4c05552