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Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications.

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Title: Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications.
Authors: Peng YC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Wang YJ; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Chen KH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Lin YH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Sakurai H; Institute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan., Chang HC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.; Electronic and Optoelectronic System Research Laboratories, Industrial Technology Research Institute, Hsinchu, 30010, Taiwan., Chiang CC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Duh RT; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Lee BR; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Huang CY; Department of Photonics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Shih MH; Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan., Horng RH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan., Konishi K; Institute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan., Tseng ML; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Source: Nano letters [Nano Lett] 2025 Feb 26; Vol. 25 (8), pp. 3141-3149. Date of Electronic Publication: 2025 Jan 29.
Publication Type: Journal Article
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 101088070 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1530-6992 (Electronic) Linking ISSN: 15306984 NLM ISO Abbreviation: Nano Lett Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications.
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  Data: <searchLink fieldCode="AU" term="%22Peng+YC%22">Peng YC</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Wang+YJ%22">Wang YJ</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chen+KH%22">Chen KH</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Lin+YH%22">Lin YH</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Sakurai+H%22">Sakurai H</searchLink>; Institute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan.<br /><searchLink fieldCode="AU" term="%22Chang+HC%22">Chang HC</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.; Electronic and Optoelectronic System Research Laboratories, Industrial Technology Research Institute, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chiang+CC%22">Chiang CC</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Duh+RT%22">Duh RT</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Lee+BR%22">Lee BR</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Huang+CY%22">Huang CY</searchLink>; Department of Photonics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Shih+MH%22">Shih MH</searchLink>; Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan.<br /><searchLink fieldCode="AU" term="%22Horng+RH%22">Horng RH</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.<br /><searchLink fieldCode="AU" term="%22Konishi+K%22">Konishi K</searchLink>; Institute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan.<br /><searchLink fieldCode="AU" term="%22Tseng+ML%22">Tseng ML</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
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  Data: <searchLink fieldCode="JN" term="%22101088070%22">Nano letters</searchLink> [Nano Lett] 2025 Feb 26; Vol. 25 (8), pp. 3141-3149. <i>Date of Electronic Publication: </i>2025 Jan 29.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22American+Chemical+Society%22">American Chemical Society </searchLink><i>Country of Publication: </i>United States <i>NLM ID: </i>101088070 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>1530-6992 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2215306984%22">15306984 </searchLink><i>NLM ISO Abbreviation: </i>Nano Lett <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
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              Text: 2025 Feb 26
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