Demonstration of NiCo as an Alternative Metal for Post-Cu Interconnects.
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| Title: | Demonstration of NiCo as an Alternative Metal for Post-Cu Interconnects. |
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| Authors: | Sung JY; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Jo GY; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Moon SM; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lee CH; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lim Y; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Yun Y; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lee SH; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lee JY; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Yang DJ; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Kim SW; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Lee SW; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea. |
| Source: | ACS nano [ACS Nano] 2025 Feb 25; Vol. 19 (7), pp. 7253-7262. Date of Electronic Publication: 2025 Feb 12. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: American Chemical Society Country of Publication: United States NLM ID: 101313589 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1936-086X (Electronic) Linking ISSN: 19360851 NLM ISO Abbreviation: ACS Nano Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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