25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography.
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| Title: | 25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography. |
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| Authors: | Chen Z; College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, Kunming, China. zhichen@kust.edu.cn., Zhong L; Institute of Light+X Science and Technology, College of Information Science and Engineering, Ningbo University, Ningbo, China. zhonglijing@nbu.edu.cn., Sun X; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China., Fu Y; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China., He H; Peng Cheng Laboratory, Shenzhen, China., Ji H; Laboratory of Molecular Pharmacology, Department of Pharmacology, School of Pharmacy, Southwest Medical University, Luzhou, China., Wang Y; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China., Liu X; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China., Xu B; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China., Wu Z; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China., Zou C; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China., Ma Z; Zhejiang Lab, Hangzhou, China. zhijma@zhejianglab.com., Zhang J; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China. jy_z@hust.edu.cn., Dong G; State Key Laboratory of Luminescent Materials and Devices, School of Materials Science and Engineering, South China University of Technology, Guangzhou, China., Barillaro G; Dipartimento di Ingegneria dell'Informazione, Università di Pisa, via G. Caruso 16, Pisa, Italy., Qiu CW; Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, Singapore. chengwei.qiu@nus.edu.sg., Qiu J; College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, Kunming, China., Qiu J; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China. qjr@zju.edu.cn. |
| Source: | Nature communications [Nat Commun] 2025 Aug 12; Vol. 16 (1), pp. 7434. Date of Electronic Publication: 2025 Aug 12. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: Nature Pub. Group Country of Publication: England NLM ID: 101528555 Publication Model: Electronic Cited Medium: Internet ISSN: 2041-1723 (Electronic) Linking ISSN: 20411723 NLM ISO Abbreviation: Nat Commun Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| ISSN: | 2041-1723 |
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| DOI: | 10.1038/s41467-025-62426-1 |
