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25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography.

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Title: 25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography.
Authors: Chen Z; College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, Kunming, China. zhichen@kust.edu.cn., Zhong L; Institute of Light+X Science and Technology, College of Information Science and Engineering, Ningbo University, Ningbo, China. zhonglijing@nbu.edu.cn., Sun X; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China., Fu Y; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China., He H; Peng Cheng Laboratory, Shenzhen, China., Ji H; Laboratory of Molecular Pharmacology, Department of Pharmacology, School of Pharmacy, Southwest Medical University, Luzhou, China., Wang Y; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China., Liu X; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China., Xu B; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China., Wu Z; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China., Zou C; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China., Ma Z; Zhejiang Lab, Hangzhou, China. zhijma@zhejianglab.com., Zhang J; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China. jy_z@hust.edu.cn., Dong G; State Key Laboratory of Luminescent Materials and Devices, School of Materials Science and Engineering, South China University of Technology, Guangzhou, China., Barillaro G; Dipartimento di Ingegneria dell'Informazione, Università di Pisa, via G. Caruso 16, Pisa, Italy., Qiu CW; Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, Singapore. chengwei.qiu@nus.edu.sg., Qiu J; College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, Kunming, China., Qiu J; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China. qjr@zju.edu.cn.
Source: Nature communications [Nat Commun] 2025 Aug 12; Vol. 16 (1), pp. 7434. Date of Electronic Publication: 2025 Aug 12.
Publication Type: Journal Article
Journal Info: Publisher: Nature Pub. Group Country of Publication: England NLM ID: 101528555 Publication Model: Electronic Cited Medium: Internet ISSN: 2041-1723 (Electronic) Linking ISSN: 20411723 NLM ISO Abbreviation: Nat Commun Subsets: MEDLINE; PubMed not MEDLINE
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  Data: 25 nm-Feature, 10<superscript>4</superscript>-aspect-ratio, 10 mm<superscript>2</superscript>-area single-pulsed laser nanolithography.
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  Data: <searchLink fieldCode="AU" term="%22Chen+Z%22">Chen Z</searchLink>; College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, Kunming, China. zhichen@kust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Zhong+L%22">Zhong L</searchLink>; Institute of Light+X Science and Technology, College of Information Science and Engineering, Ningbo University, Ningbo, China. zhonglijing@nbu.edu.cn.<br /><searchLink fieldCode="AU" term="%22Sun+X%22">Sun X</searchLink>; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China.<br /><searchLink fieldCode="AU" term="%22Fu+Y%22">Fu Y</searchLink>; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China.<br /><searchLink fieldCode="AU" term="%22He+H%22">He H</searchLink>; Peng Cheng Laboratory, Shenzhen, China.<br /><searchLink fieldCode="AU" term="%22Ji+H%22">Ji H</searchLink>; Laboratory of Molecular Pharmacology, Department of Pharmacology, School of Pharmacy, Southwest Medical University, Luzhou, China.<br /><searchLink fieldCode="AU" term="%22Wang+Y%22">Wang Y</searchLink>; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China.<br /><searchLink fieldCode="AU" term="%22Liu+X%22">Liu X</searchLink>; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China.<br /><searchLink fieldCode="AU" term="%22Xu+B%22">Xu B</searchLink>; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China.<br /><searchLink fieldCode="AU" term="%22Wu+Z%22">Wu Z</searchLink>; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China.<br /><searchLink fieldCode="AU" term="%22Zou+C%22">Zou C</searchLink>; School of Materials Science and Engineering, Zhejiang University, Hangzhou, China.<br /><searchLink fieldCode="AU" term="%22Ma+Z%22">Ma Z</searchLink>; Zhejiang Lab, Hangzhou, China. zhijma@zhejianglab.com.<br /><searchLink fieldCode="AU" term="%22Zhang+J%22">Zhang J</searchLink>; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China. jy_z@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Dong+G%22">Dong G</searchLink>; State Key Laboratory of Luminescent Materials and Devices, School of Materials Science and Engineering, South China University of Technology, Guangzhou, China.<br /><searchLink fieldCode="AU" term="%22Barillaro+G%22">Barillaro G</searchLink>; Dipartimento di Ingegneria dell'Informazione, Università di Pisa, via G. Caruso 16, Pisa, Italy.<br /><searchLink fieldCode="AU" term="%22Qiu+CW%22">Qiu CW</searchLink>; Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, Singapore. chengwei.qiu@nus.edu.sg.<br /><searchLink fieldCode="AU" term="%22Qiu+J%22">Qiu J</searchLink>; College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, Kunming, China.<br /><searchLink fieldCode="AU" term="%22Qiu+J%22">Qiu J</searchLink>; State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China. qjr@zju.edu.cn.
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  Data: <searchLink fieldCode="JN" term="%22101528555%22">Nature communications</searchLink> [Nat Commun] 2025 Aug 12; Vol. 16 (1), pp. 7434. <i>Date of Electronic Publication: </i>2025 Aug 12.
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