Temperature-induced interfacial intermixing and trap modulation in ONO-based flash memory capacitors.
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| Title: | Temperature-induced interfacial intermixing and trap modulation in ONO-based flash memory capacitors. |
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| Authors: | Son H; Department of Electronic Engineering, Kwangwoon University, Seoul 01897, Republic of Korea., Sim K; Department of Electronic Engineering, Kwangwoon University, Seoul 01897, Republic of Korea., Hwang HC; National NanoFab Center, Daejeon 34141, Republic of Korea., Park H; Department of Electronic Engineering, Kwangwoon University, Seoul 01897, Republic of Korea. |
| Source: | Nanotechnology [Nanotechnology] 2025 Sep 30; Vol. 36 (40). Date of Electronic Publication: 2025 Sep 30. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: IOP Pub Country of Publication: England NLM ID: 101241272 Publication Model: Electronic Cited Medium: Internet ISSN: 1361-6528 (Electronic) Linking ISSN: 09574484 NLM ISO Abbreviation: Nanotechnology Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 1361-6528 |
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| DOI: | 10.1088/1361-6528/ae08bf |
