Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber.
Saved in:
| Title: | Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber. |
|---|---|
| Authors: | Avraham M; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel., Nemirovsky Y; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel. |
| Source: | Sensors (Basel, Switzerland) [Sensors (Basel)] 2025 Nov 07; Vol. 25 (22). Date of Electronic Publication: 2025 Nov 07. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
|
Full text is not displayed to guests.
Login for full access.
|
|
| ISSN: | 1424-8220 |
|---|---|
| DOI: | 10.3390/s25226819 |
