APA (7th ed.) Citation

M, A., & Y, N. (2025). Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber. Sensors (Basel, Switzerland), 25(22), . https://doi.org/10.3390/s25226819

Chicago Style (17th ed.) Citation

M, Avraham, and Nemirovsky Y. "Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber." Sensors (Basel, Switzerland) 25, no. 22 (2025). https://doi.org/10.3390/s25226819.

MLA (9th ed.) Citation

M, Avraham, and Nemirovsky Y. "Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber." Sensors (Basel, Switzerland), vol. 25, no. 22, 2025, https://doi.org/10.3390/s25226819.