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Exploiting Mg-Interdiffusion-Driven Work-Function Reduction in Ti/Mg/Ti Multilayers to Achieve Low-Resistivity Ohmic Contacts to (001) β-Ga2O3.

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Title: Exploiting Mg-Interdiffusion-Driven Work-Function Reduction in Ti/Mg/Ti Multilayers to Achieve Low-Resistivity Ohmic Contacts to (001) β-Ga2O3.
Authors: Labed M; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.; Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea., Shin K; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea., Shaikh MTAS; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea., Park JH; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea., Cheon YJ; Department of Intelligent Mechatronics Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea., Park BI; Department of Semiconductor Science & Technology, Jeonbuk National University, Jeonju 54896, Republic of Korea., Pearton SJ; Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611, United States of America., Rim YS; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.; Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.
Source: ACS nano [ACS Nano] 2026 Jan 13; Vol. 20 (1), pp. 849-863. Date of Electronic Publication: 2025 Dec 31.
Publication Type: Journal Article
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 101313589 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1936-086X (Electronic) Linking ISSN: 19360851 NLM ISO Abbreviation: ACS Nano Subsets: MEDLINE; PubMed not MEDLINE
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  Data: Exploiting Mg-Interdiffusion-Driven Work-Function Reduction in Ti/Mg/Ti Multilayers to Achieve Low-Resistivity Ohmic Contacts to (001) β-Ga<subscript>2</subscript>O<subscript>3</subscript>.
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  Data: <searchLink fieldCode="AU" term="%22Labed+M%22">Labed M</searchLink>; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.; Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Shin+K%22">Shin K</searchLink>; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Shaikh+MTAS%22">Shaikh MTAS</searchLink>; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Park+JH%22">Park JH</searchLink>; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Cheon+YJ%22">Cheon YJ</searchLink>; Department of Intelligent Mechatronics Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Park+BI%22">Park BI</searchLink>; Department of Semiconductor Science & Technology, Jeonbuk National University, Jeonju 54896, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Pearton+SJ%22">Pearton SJ</searchLink>; Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611, United States of America.<br /><searchLink fieldCode="AU" term="%22Rim+YS%22">Rim YS</searchLink>; Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.; Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea.
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