Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
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| Title: | Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions. |
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| Authors: | Fields SS; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA., White CD; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA., Knipling KE; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA., Bennett SP; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA. |
| Source: | The Review of scientific instruments [Rev Sci Instrum] 2026 Feb 01; Vol. 97 (2). |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: American Institute Of Physics Country of Publication: United States NLM ID: 0405571 Publication Model: Print Cited Medium: Internet ISSN: 1089-7623 (Electronic) Linking ISSN: 00346748 NLM ISO Abbreviation: Rev Sci Instrum Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 1089-7623 |
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| DOI: | 10.1063/5.0303021 |
