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Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.

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Title: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
Authors: Fields SS; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA., White CD; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA., Knipling KE; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA., Bennett SP; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA.
Source: The Review of scientific instruments [Rev Sci Instrum] 2026 Feb 01; Vol. 97 (2).
Publication Type: Journal Article
Journal Info: Publisher: American Institute Of Physics Country of Publication: United States NLM ID: 0405571 Publication Model: Print Cited Medium: Internet ISSN: 1089-7623 (Electronic) Linking ISSN: 00346748 NLM ISO Abbreviation: Rev Sci Instrum Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
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  Data: <searchLink fieldCode="AU" term="%22Fields+SS%22">Fields SS</searchLink>; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA.<br /><searchLink fieldCode="AU" term="%22White+CD%22">White CD</searchLink>; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA.<br /><searchLink fieldCode="AU" term="%22Knipling+KE%22">Knipling KE</searchLink>; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA.<br /><searchLink fieldCode="AU" term="%22Bennett+SP%22">Bennett SP</searchLink>; Materials Science and Technology Division, U.S. Naval Research Laboratory, Washington, District of Columbia 20375, USA.
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  Data: <searchLink fieldCode="JN" term="%220405571%22">The Review of scientific instruments</searchLink> [Rev Sci Instrum] 2026 Feb 01; Vol. 97 (2).
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22American+Institute+Of+Physics%22">American Institute Of Physics </searchLink><i>Country of Publication: </i>United States <i>NLM ID: </i>0405571 <i>Publication Model: </i>Print <i>Cited Medium: </i>Internet <i>ISSN: </i>1089-7623 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2200346748%22">00346748 </searchLink><i>NLM ISO Abbreviation: </i>Rev Sci Instrum <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
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        Value: 10.1063/5.0303021
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        Text: English
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      – TitleFull: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
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            NameFull: Fields SS
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            NameFull: White CD
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            – D: 01
              M: 02
              Text: 2026 Feb 01
              Type: published
              Y: 2026
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              Value: 1089-7623
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              Value: 97
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