Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors.
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| Title: | Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors. |
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| Authors: | Avraham M; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 320003, Israel., Nemirovsky Y; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 320003, Israel. |
| Source: | Micromachines [Micromachines (Basel)] 2026 Jan 28; Vol. 17 (2). Date of Electronic Publication: 2026 Jan 28. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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