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Wafer-Scale Electrical Characterization of Al/AlxOy/Al Tunnel Junctions for Process Monitoring at Room Temperature.

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Title: Wafer-Scale Electrical Characterization of Al/AlxOy/Al Tunnel Junctions for Process Monitoring at Room Temperature.
Authors: Lang SJK; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Eisele I; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.; Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München, 85577 Munich, Germany., Weber J; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Schewski A; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Music E; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Maiwald A; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Hahn M; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Zahn D; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Luo Z; School of Computation, Information and Technology (CIT), Technical University of Munich, 85748 Garching, Germany., Nebrich L; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Schoof B; School of Computation, Information and Technology (CIT), Technical University of Munich, 85748 Garching, Germany., Mayer T; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Sturm-Rogon L; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Lerch W; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Pereira RN; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Kutter C; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.; Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München, 85577 Munich, Germany.
Source: Nanomaterials (Basel, Switzerland) [Nanomaterials (Basel)] 2026 May 07; Vol. 16 (10). Date of Electronic Publication: 2026 May 07.
Publication Type: Journal Article
Journal Info: Publisher: MDPI AG Country of Publication: Switzerland NLM ID: 101610216 Publication Model: Electronic Cited Medium: Print ISSN: 2079-4991 (Print) Linking ISSN: 20794991 NLM ISO Abbreviation: Nanomaterials (Basel) Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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Description
ISSN:2079-4991
DOI:10.3390/nano16100569