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Wafer-Scale Electrical Characterization of Al/AlxOy/Al Tunnel Junctions for Process Monitoring at Room Temperature.

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Title: Wafer-Scale Electrical Characterization of Al/AlxOy/Al Tunnel Junctions for Process Monitoring at Room Temperature.
Authors: Lang SJK; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Eisele I; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.; Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München, 85577 Munich, Germany., Weber J; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Schewski A; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Music E; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Maiwald A; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Hahn M; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Zahn D; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Luo Z; School of Computation, Information and Technology (CIT), Technical University of Munich, 85748 Garching, Germany., Nebrich L; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Schoof B; School of Computation, Information and Technology (CIT), Technical University of Munich, 85748 Garching, Germany., Mayer T; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Sturm-Rogon L; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Lerch W; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Pereira RN; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany., Kutter C; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.; Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München, 85577 Munich, Germany.
Source: Nanomaterials (Basel, Switzerland) [Nanomaterials (Basel)] 2026 May 07; Vol. 16 (10). Date of Electronic Publication: 2026 May 07.
Publication Type: Journal Article
Journal Info: Publisher: MDPI AG Country of Publication: Switzerland NLM ID: 101610216 Publication Model: Electronic Cited Medium: Print ISSN: 2079-4991 (Print) Linking ISSN: 20794991 NLM ISO Abbreviation: Nanomaterials (Basel) Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Wafer-Scale Electrical Characterization of Al/Al<subscript>x</subscript>O<subscript>y</subscript>/Al Tunnel Junctions for Process Monitoring at Room Temperature.
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  Data: <searchLink fieldCode="AU" term="%22Lang+SJK%22">Lang SJK</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Eisele+I%22">Eisele I</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.; Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München, 85577 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Weber+J%22">Weber J</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Schewski+A%22">Schewski A</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Music+E%22">Music E</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Maiwald+A%22">Maiwald A</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Hahn+M%22">Hahn M</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Zahn+D%22">Zahn D</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Luo+Z%22">Luo Z</searchLink>; School of Computation, Information and Technology (CIT), Technical University of Munich, 85748 Garching, Germany.<br /><searchLink fieldCode="AU" term="%22Nebrich+L%22">Nebrich L</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Schoof+B%22">Schoof B</searchLink>; School of Computation, Information and Technology (CIT), Technical University of Munich, 85748 Garching, Germany.<br /><searchLink fieldCode="AU" term="%22Mayer+T%22">Mayer T</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Sturm-Rogon+L%22">Sturm-Rogon L</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Lerch+W%22">Lerch W</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Pereira+RN%22">Pereira RN</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.<br /><searchLink fieldCode="AU" term="%22Kutter+C%22">Kutter C</searchLink>; Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT, 80686 Munich, Germany.; Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München, 85577 Munich, Germany.
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  Data: <searchLink fieldCode="JN" term="%22101610216%22">Nanomaterials (Basel, Switzerland)</searchLink> [Nanomaterials (Basel)] 2026 May 07; Vol. 16 (10). <i>Date of Electronic Publication: </i>2026 May 07.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22MDPI+AG%22">MDPI AG </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>101610216 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>2079-4991 (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2220794991%22">20794991 </searchLink><i>NLM ISO Abbreviation: </i>Nanomaterials (Basel) <i>Subsets: </i>PubMed not MEDLINE
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              Text: 2026 May 07
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