| Authors: |
Lee J; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, South Korea.; Center For Quantum Nanoscience, Institute For Basic Science (IBS), Seoul, South Korea., Kim G; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Lee D; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, South Korea., Son S; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea., Seok H; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea.; Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA., Son S; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea., Choi H; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Kim G; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, South Korea., Back G; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Kim H; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea., Park C; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Ahn J; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Je S; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea., Im C; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea., Cho J; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, South Korea., Grzeszczyk M; Center For Quantum Nanoscience, Institute For Basic Science (IBS), Seoul, South Korea.; Department of Physics, Ewha Womans University, Seoul, South Korea., Kim S; Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon, South Korea., Go E; Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon, South Korea., Shim H; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Choi D; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, South Korea., Kim M; Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon, South Korea., Kim HU; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, South Korea.; Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon, South Korea., Jang WJ; Center For Quantum Nanoscience, Institute For Basic Science (IBS), Seoul, South Korea.; Department of Physics, Ewha Womans University, Seoul, South Korea., Kim T; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, South Korea.; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon, South Korea.; Department of Nano Engineering, Sungkyunkwan University, Suwon, South Korea. |
