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Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing.

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Title: Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing.
Authors: Wu C; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China., Fang X; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn., Sun H; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Zhang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Shi M; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Liu Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Fang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Yan Y; Xi'dian University, Xi'an, 710071, China., Kang Q; Xi'dian University, Xi'an, 710071, China., Maeda R; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Tian B; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Zhao L; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Jiang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.
Source: Microsystems & nanoengineering [Microsyst Nanoeng] 2026 Jun 03; Vol. 12 (1). Date of Electronic Publication: 2026 Jun 03.
Publication Type: Journal Article; Review
Journal Info: Publisher: Nature Publishing Group Country of Publication: England NLM ID: 101695458 Publication Model: Electronic Cited Medium: Internet ISSN: 2055-7434 (Electronic) Linking ISSN: 20557434 NLM ISO Abbreviation: Microsyst Nanoeng Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing.
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  Data: <searchLink fieldCode="AU" term="%22Wu+C%22">Wu C</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China.<br /><searchLink fieldCode="AU" term="%22Fang+X%22">Fang X</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn.<br /><searchLink fieldCode="AU" term="%22Sun+H%22">Sun H</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Zhang+Z%22">Zhang Z</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Shi+M%22">Shi M</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Liu+Z%22">Liu Z</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Fang+Z%22">Fang Z</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Yan+Y%22">Yan Y</searchLink>; Xi'dian University, Xi'an, 710071, China.<br /><searchLink fieldCode="AU" term="%22Kang+Q%22">Kang Q</searchLink>; Xi'dian University, Xi'an, 710071, China.<br /><searchLink fieldCode="AU" term="%22Maeda+R%22">Maeda R</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Tian+B%22">Tian B</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Zhao+L%22">Zhao L</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.<br /><searchLink fieldCode="AU" term="%22Jiang+Z%22">Jiang Z</searchLink>; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.
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  Data: <searchLink fieldCode="JN" term="%22101695458%22">Microsystems & nanoengineering</searchLink> [Microsyst Nanoeng] 2026 Jun 03; Vol. 12 (1). <i>Date of Electronic Publication: </i>2026 Jun 03.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22Nature+Publishing+Group%22">Nature Publishing Group </searchLink><i>Country of Publication: </i>England <i>NLM ID: </i>101695458 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>2055-7434 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2220557434%22">20557434 </searchLink><i>NLM ISO Abbreviation: </i>Microsyst Nanoeng <i>Subsets: </i>PubMed not MEDLINE
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RecordInfo BibRecord:
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        Value: 10.1038/s41378-026-01214-3
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        Text: English
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              Text: 2026 Jun 03
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