| Authors: |
Wu C; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China., Fang X; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn., Sun H; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Zhang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Shi M; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Liu Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Fang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Yan Y; Xi'dian University, Xi'an, 710071, China., Kang Q; Xi'dian University, Xi'an, 710071, China., Maeda R; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Tian B; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Zhao L; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China., Jiang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China. |
