| Authors: |
Kang M; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Kim S; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Go E; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Byun S; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Cho D; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea., Kim T; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea., Kang H; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Eco-Friendly & Energy Machines, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea., Lee J; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.; Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, Republic of Korea., Ko M; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Jeon N; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Choi MS; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Kim HU; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.; Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea. |
