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Machine Learning-Enabled In Situ Diagnostics for Intelligent Plasma-Based Semiconductor Manufacturing: A Review.

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Title: Machine Learning-Enabled In Situ Diagnostics for Intelligent Plasma-Based Semiconductor Manufacturing: A Review.
Authors: Kang M; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Kim S; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Go E; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Byun S; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Cho D; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea., Kim T; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea., Kang H; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Eco-Friendly & Energy Machines, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea., Lee J; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.; Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, Republic of Korea., Ko M; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Jeon N; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Choi MS; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea., Kim HU; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.; Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea.
Source: ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2026 Jul 15; Vol. 18 (27), pp. 37378-37399. Date of Electronic Publication: 2026 Jun 24.
Publication Type: Journal Article; Review
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 101504991 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1944-8252 (Electronic) Linking ISSN: 19448244 NLM ISO Abbreviation: ACS Appl Mater Interfaces Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Machine Learning-Enabled In Situ Diagnostics for Intelligent Plasma-Based Semiconductor Manufacturing: A Review.
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  Data: <searchLink fieldCode="AU" term="%22Kang+M%22">Kang M</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Kim+S%22">Kim S</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Go+E%22">Go E</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Byun+S%22">Byun S</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Cho+D%22">Cho D</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Kim+T%22">Kim T</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Kang+H%22">Kang H</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; Eco-Friendly & Energy Machines, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Lee+J%22">Lee J</searchLink>; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.; Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Ko+M%22">Ko M</searchLink>; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Jeon+N%22">Jeon N</searchLink>; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Choi+MS%22">Choi MS</searchLink>; Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Kim+HU%22">Kim HU</searchLink>; Semiconductor Manufacturing Research Center, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Republic of Korea.; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.; Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22American+Chemical+Society%22">American Chemical Society </searchLink><i>Country of Publication: </i>United States <i>NLM ID: </i>101504991 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>1944-8252 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2219448244%22">19448244 </searchLink><i>NLM ISO Abbreviation: </i>ACS Appl Mater Interfaces <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
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        Value: 10.1021/acsami.6c04768
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              Text: 2026 Jul 15
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