Reversibly Stacked Monolithic 3D Integrated Circuits.

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Title: Reversibly Stacked Monolithic 3D Integrated Circuits.
Authors: Weng TT; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan., Wang ST; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan., Chang YC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan., Li KW; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan., Chung CC; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan., Lo CH; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan., Tseng R; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan., Chen SC; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan., Chou TT; National Center for Instrumentation Research, National Institutes of Applied Research, Hsinchu, Taiwan., Hung TYT; Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan., Cheng CC; Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan., Radu IP; Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan., Chueh YL; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan. ylchueh@mx.nthu.edu.tw.; College of Semiconductor Research, National Tsing-Hua University, Hsinchu, Taiwan. ylchueh@mx.nthu.edu.tw.; Department of Physics, National Sun Yat-sen University, Kaohsiung, Taiwan. ylchueh@mx.nthu.edu.tw.; Department of Materials Science and Engineering, Korea University, Seoul, Republic of Korea. ylchueh@mx.nthu.edu.tw., Lien DH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan. dhlien@nycu.edu.tw.
Source: Nature communications [Nat Commun] 2026 Jul 09. Date of Electronic Publication: 2026 Jul 09.
Publication Type: Journal Article
Journal Info: Publisher: Nature Pub. Group Country of Publication: England NLM ID: 101528555 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 2041-1723 (Electronic) Linking ISSN: 20411723 NLM ISO Abbreviation: Nat Commun Subsets: MEDLINE
Database: MEDLINE Ultimate
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  Data: Reversibly Stacked Monolithic 3D Integrated Circuits.
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  Data: <searchLink fieldCode="AU" term="%22Weng+TT%22">Weng TT</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Wang+ST%22">Wang ST</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chang+YC%22">Chang YC</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Li+KW%22">Li KW</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chung+CC%22">Chung CC</searchLink>; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Lo+CH%22">Lo CH</searchLink>; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Tseng+R%22">Tseng R</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chen+SC%22">Chen SC</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chou+TT%22">Chou TT</searchLink>; National Center for Instrumentation Research, National Institutes of Applied Research, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Hung+TYT%22">Hung TYT</searchLink>; Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Cheng+CC%22">Cheng CC</searchLink>; Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Radu+IP%22">Radu IP</searchLink>; Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan.<br /><searchLink fieldCode="AU" term="%22Chueh+YL%22">Chueh YL</searchLink>; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan. ylchueh@mx.nthu.edu.tw.; College of Semiconductor Research, National Tsing-Hua University, Hsinchu, Taiwan. ylchueh@mx.nthu.edu.tw.; Department of Physics, National Sun Yat-sen University, Kaohsiung, Taiwan. ylchueh@mx.nthu.edu.tw.; Department of Materials Science and Engineering, Korea University, Seoul, Republic of Korea. ylchueh@mx.nthu.edu.tw.<br /><searchLink fieldCode="AU" term="%22Lien+DH%22">Lien DH</searchLink>; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan. dhlien@nycu.edu.tw.
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              Text: 2026 Jul 09
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