A new approach to probing the depths of multilayer structures in SEM.
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| Title: | A new approach to probing the depths of multilayer structures in SEM. |
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| Authors: | Zhdanov, G.1 GSZhdanov@mail.ru, Lozhkin, M.1 |
| Source: | Bulletin of the Russian Academy of Sciences: Physics. Nov2015, Vol. 79 Issue 11, p1340-1344. 5p. |
| Database: | Mathematics Source |
| ISSN: | 10628738 |
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| DOI: | 10.3103/S106287381511026X |
