Analytical investigation of air squeeze film damping for bi‐axial micro‐scanner using eigenfunction expansion method.

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Bibliographic Details
Title: Analytical investigation of air squeeze film damping for bi‐axial micro‐scanner using eigenfunction expansion method.
Authors: Atabak, Ruhollah1 (AUTHOR), Sedighi, Hamid M.2 (AUTHOR) hmsedighi@gmail.com, Reza, Arash1 (AUTHOR) arashreza@gmail.com, Mirshekari, Erfan1 (AUTHOR)
Source: Mathematical Methods in the Applied Sciences. Apr2026, Vol. 49 Issue 6, p5223-5232. 10p.
Database: Mathematics Source
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ISSN:01704214
DOI:10.1002/mma.6658