电子级超纯氮深冷空分流程节能优化研究.
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| Title: | 电子级超纯氮深冷空分流程节能优化研究. |
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| Alternate Title: | Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen. |
| Authors: | 曾海涛1, 徐锋2, 余志鹏1, 蒲亮1,3,4, 刘运生4 |
| Source: | Journal of Xi'an Jiaotong University. Jul2026, Vol. 60 Issue 7, p97-108. 12p. |
| Database: | Mathematics Source |
| ISSN: | 0253987X |
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| DOI: | 10.7652/xjtuxb202607010 |
