Ultra Clean Processing of Semiconductor Surfaces XI

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Bibliographic Details
Title:	Ultra Clean Processing of Semiconductor Surfaces XI
Description:	Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
Authors:	Paul Mertens, Marc Meuris, Marc Heyns
Resource Type:	eBook.
Subjects:	Electrical engineering--Congresses, Semiconductors--Surfaces--Congresses
Categories:	TECHNOLOGY & ENGINEERING / Materials Science / General
Database:	eBook Collection (EBSCOhost)

Description
Abstract:	Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
ISBN:	9783037855270 9783038139089