Material Science and MEMS Production

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Bibliographic Details
Title:	Material Science and MEMS Production
Description:	Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
Authors:	Chang Hui Liu
Resource Type:	eBook.
Subjects:	Nanotechnology--Congresses, Microelectromechanical systems--Congresses
Categories:	TECHNOLOGY & ENGINEERING / Materials Science / General
Database:	eBook Collection (EBSCOhost)

Description
Abstract:	Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
ISBN:	9783038350477 9783038264286