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Material Science and MEMS Production

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Title: Material Science and MEMS Production
Description: Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
Authors: Chang Hui Liu
Resource Type: eBook.
Subjects: Nanotechnology--Congresses, Microelectromechanical systems--Congresses
Categories: TECHNOLOGY & ENGINEERING / Materials Science / General
Database: eBook Collection (EBSCOhost)
FullText Links:
  – Type: ebook-pdf
Text:
  Availability: 0
Header DbId: nlebk
DbLabel: eBook Collection (EBSCOhost)
An: 711952
RelevancyScore: 1057
AccessLevel: 6
PubType: eBook
PubTypeId: ebook
PreciseRelevancyScore: 1057.36352539063
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  Data: Material Science and MEMS Production
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  Data: Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
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  Data: <searchLink fieldCode="AR" term="%22Chang+Hui+Liu%22">Chang Hui Liu</searchLink>
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RecordInfo BibRecord:
  BibEntity:
    Classifications:
      – Code: 621.381
        Scheme: ddc
        Type: prePub
    Languages:
      – Code: eng
        Text: English
    Subjects:
      – SubjectFull: Nanotechnology--Congresses
        Type: general
      – SubjectFull: Microelectromechanical systems--Congresses
        Type: general
    Titles:
      – TitleFull: Material Science and MEMS Production
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chang Hui Liu
      – PersonEntity:
          Name:
            NameFull: Chang Hui Liu
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Type: published
              Y: 2014
            – D: 21
              M: 05
              Type: profile
              Y: 2014
          Identifiers:
            – Type: isbn-print
              Value: 9783038350477
            – Type: isbn-electronic
              Value: 9783038264286
          Numbering:
            – Type: volume
              Value: 00901
          Titles:
            – TitleFull: Material Science and MEMS Production
              Type: main
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