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32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.

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Bibliographic Details
Title: 32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.
Authors: Qu, Shuhui1, Yazdani, Kasra1, Lee, Janghwan1
Source: SID Symposium Digest of Technical Papers; Jun2024, Vol. 55 Issue 1, p417-420, 4p
Database: Applied Science & Technology Source
Description
ISSN:0097966X
DOI:10.1002/sdtp.17546