Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: E. Herth et al.

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Bibliographic Details
Title: Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: E. Herth et al.
Authors: Herth, Etienne1, etienne.herth@cnrs.fr, Cavalliers, Bruno2, Salhi, Sarra1,3, Kardous, Faten3, Fall, Dame2, Rousseau, Lionel4, Valbin, Laurie4, Lardet-Vieudrin, Franck2
Source: Journal of Electronic Materials; May2025, Vol. 54 Issue 5, p3760-3772, 13p
Database: Applied Science & Technology Source
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