Bibliographic Details
| Title: |
A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm. |
| Authors: |
Wang, Chen1, Wu, Xinyu1, Sadeghpour, Sina1, Shojaeian, Milad1, Wang, Linlin1, Madeira, Bernardo Pereira1, Guan, Yangyang1, Liu, Huafeng2, huafengliu@hust.edu.cn, Wang, Yuan3, yuanwang@um.edu.mo, Zhang, Pan4, Mak, Pui-in3 |
| Source: |
Microsystems & Nanoengineering; 4/16/2025, Vol. 11 Issue 1, p1-18, 18p |
| Database: |
Applied Science & Technology Source |