A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm.

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Bibliographic Details
Title: A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm.
Authors: Wang, Chen1, Wu, Xinyu1, Sadeghpour, Sina1, Shojaeian, Milad1, Wang, Linlin1, Madeira, Bernardo Pereira1, Guan, Yangyang1, Liu, Huafeng2, huafengliu@hust.edu.cn, Wang, Yuan3, yuanwang@um.edu.mo, Zhang, Pan4, Mak, Pui-in3
Source: Microsystems & Nanoengineering; 4/16/2025, Vol. 11 Issue 1, p1-18, 18p
Database: Applied Science & Technology Source
Description
ISSN:20961030
DOI:10.1038/s41378-025-00910-w