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Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.

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Bibliographic Details
Title: Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.
Authors: Pan, Jingyu1,2, Zhang, Dongsheng1,2, wjg@siom.ac.cn, Liu, Shijie1,2, jdshao@siom.ac.cn, Wang, Jianguo2, Shao, Jianda2
Source: Coatings (2079-6412); Jun2025, Vol. 15 Issue 6, p700, 20p
Database: Applied Science & Technology Source
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