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Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.

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Bibliographic Details
Title: Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.
Authors: Marks, M. R., Kintrup, L., Bittigau, K.
Source: Vacuum; March 1995, Vol. 46, p281-286, 6p
Database: Applied Science & Technology Source
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