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Investigation of silicon oxide films prepared by room-temperature ion plating.

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Bibliographic Details
Title: Investigation of silicon oxide films prepared by room-temperature ion plating.
Authors: Yeh, Ching-Fa, Chen, Tai-Ju, Fan, Ching-Lin
Source: Journal of Applied Physics; January 15 1998, Vol. 83, p1107-1113, 7p
Database: Applied Science & Technology Source
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