Electrical Characterization of n-Type Polycrystalline 3C-Silicon Carbide Thin Films Deposited by 1,3-Disilabutane.
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| Title: | Electrical Characterization of n-Type Polycrystalline 3C-Silicon Carbide Thin Films Deposited by 1,3-Disilabutane. |
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| Authors: | Zhang, Jingchun, Howe, Roger T., Maboudian, Roya |
| Source: | Journal of the Electrochemical Society; 2006, Vol. 153 Issue 6, pG548-G551, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2188327 |
