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Technologies for Cofabricating MEMS and Electronics.

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Bibliographic Details
Title: Technologies for Cofabricating MEMS and Electronics.
Authors: Fedder, Gary K., Howe, Roger T., Liu, Tsu-Jae King
Source: Proceedings of the IEEE; February 2008, Vol. 96 Issue 2, p306-322, 17p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501547127
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1109/JPROC.2007.911064
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      – Code: eng
        Text: English
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        PageCount: 17
        StartPage: 306
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      – TitleFull: Technologies for Cofabricating MEMS and Electronics.
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          Name:
            NameFull: Fedder, Gary K.
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            NameFull: Howe, Roger T.
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            NameFull: Liu, Tsu-Jae King
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            – D: 01
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              Text: February 2008
              Type: published
              Y: 2008
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              Value: 96
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