View in EDS

Technologies for Cofabricating MEMS and Electronics.

Saved in:
Bibliographic Details
Title: Technologies for Cofabricating MEMS and Electronics.
Authors: Fedder, Gary K., Howe, Roger T., Liu, Tsu-Jae King
Source: Proceedings of the IEEE; February 2008, Vol. 96 Issue 2, p306-322, 17p
Database: Applied Science & Technology Source
Be the first to leave a comment!
You must be logged in first