Capacitance and doping profiles of ion-implanted, buried-channel MOSFETs.
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| Title: | Capacitance and doping profiles of ion-implanted, buried-channel MOSFETs. |
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| Authors: | Lubberts, G., Burkey, B. C. |
| Source: | Solid-State Electronics; January 1979, Vol. 22, p47-54, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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