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Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.

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Bibliographic Details
Title: Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.
Authors: Brady, F. T., Li, S. S., Burk, D. E., Krull, W. A.
Source: Applied Physics Letters; 3/14/1988, Vol. 52 Issue 11, p886, 3p
Database: Applied Science & Technology Source
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