View in EDS

Enhanced electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon deposited by plasma-enhanced chemical vapor deposition.

Saved in:
Bibliographic Details
Title: Enhanced electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon deposited by plasma-enhanced chemical vapor deposition.
Authors: Ohi, S., Burger, W. R., Reif, R.
Source: Applied Physics Letters; 9/5/1988, Vol. 53 Issue 10, p891, 3p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 9827968
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Enhanced electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon deposited by plasma-enhanced chemical vapor deposition.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Ohi%2C+S%2E%22">Ohi, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Burger%2C+W%2E+R%2E%22">Burger, W. R.</searchLink><br /><searchLink fieldCode="AU" term="%22Reif%2C+R%2E%22">Reif, R.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; 9/5/1988, Vol. 53 Issue 10, p891, 3p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=9827968
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.100106
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 3
        StartPage: 891
    Titles:
      – TitleFull: Enhanced electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon deposited by plasma-enhanced chemical vapor deposition.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Ohi, S.
      – PersonEntity:
          Name:
            NameFull: Burger, W. R.
      – PersonEntity:
          Name:
            NameFull: Reif, R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 05
              M: 09
              Text: 9/5/1988
              Type: published
              Y: 1988
          Identifiers:
            – Type: issn-print
              Value: 00036951
          Numbering:
            – Type: volume
              Value: 53
            – Type: issue
              Value: 10
          Titles:
            – TitleFull: Applied Physics Letters
              Type: main
ResultId 1