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Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices.

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Title: Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices.
Authors: Bargiel S; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France., Cogan J; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Queste S; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France., Oliveri S; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France., Gauthier-Manuel L; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France., Raschetti M; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France., Leroy O; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Beurthey S; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Perrin-Terrin M; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France.
Source: Micromachines [Micromachines (Basel)] 2023 Jun 24; Vol. 14 (7). Date of Electronic Publication: 2023 Jun 24.
Publication Type: Journal Article
Journal Info: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices.
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  Data: <searchLink fieldCode="AU" term="%22Bargiel+S%22">Bargiel S</searchLink>; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France.<br /><searchLink fieldCode="AU" term="%22Cogan+J%22">Cogan J</searchLink>; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France.<br /><searchLink fieldCode="AU" term="%22Queste+S%22">Queste S</searchLink>; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France.<br /><searchLink fieldCode="AU" term="%22Oliveri+S%22">Oliveri S</searchLink>; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France.<br /><searchLink fieldCode="AU" term="%22Gauthier-Manuel+L%22">Gauthier-Manuel L</searchLink>; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France.<br /><searchLink fieldCode="AU" term="%22Raschetti+M%22">Raschetti M</searchLink>; Institut FEMTO-ST, CNRS, Université de Franche-Comté, F-25000 Besançon, France.<br /><searchLink fieldCode="AU" term="%22Leroy+O%22">Leroy O</searchLink>; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France.<br /><searchLink fieldCode="AU" term="%22Beurthey+S%22">Beurthey S</searchLink>; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France.<br /><searchLink fieldCode="AU" term="%22Perrin-Terrin+M%22">Perrin-Terrin M</searchLink>; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France.
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  Data: <searchLink fieldCode="JN" term="%22101640903%22">Micromachines</searchLink> [Micromachines (Basel)] 2023 Jun 24; Vol. 14 (7). <i>Date of Electronic Publication: </i>2023 Jun 24.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22MDPI%22">MDPI </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>101640903 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>2072-666X (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%222072666X%22">2072666X </searchLink><i>NLM ISO Abbreviation: </i>Micromachines (Basel) <i>Subsets: </i>PubMed not MEDLINE
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        Value: 10.3390/mi14071297
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        Text: English
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      – TitleFull: Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices.
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              M: 06
              Text: 2023 Jun 24
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